Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture (H2O) and oxygen (O2).
High stability TDL trace/ultra-trace measurements
A no-compromise solution
Simple maintenance and reduced ongoing costs
Delivering a compact integrated solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E is an analyzer designed for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.
Combining the industry-leading properties of Servomex’s non-depleting Coulometric sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E measures ultra-low contaminant levels of H2O and O2 within background gas blends of nitrogen (N2), hydrogen (H2), Helium (He), O2 and Argon (Ar) (H2O in O2 only).
Offering exceptionally low, industry-leading Lower Detection Limits (LDL) of 100ppt (H2O) and 45ppt (O2), the DF-760E provides a fast speed of response, unsurpassed stability and immunity from trace acid damage, making it ideal for quality checking and leak detection in semiconductor FAB applications.
This unmatched measurement performance is supported by a low-maintenance design, delivered through the resilient zero-drift sensing technologies which require no ongoing calibration.
When you work in the manufacture of integrated circuit boards, the quality control of electronics grade UHP gas is crucial.