nitrogen analyzer / oxygen / hydrogen / trace
DF-750 NanoTrace SERVOMEX



  • Measured entity:

    nitrogen, oxygen, hydrogen

  • Measured value:

    trace, moisture

  • Configuration:

    for integration

  • Other characteristics:

    monitoring, TDL


Designed specifically to make trace and ultra-trace measurements in a range of ultra high purity gases, the DF-750 is the leading choice in moisture analysis for the semiconductor industry. Optimized for use in 300mm semiconductor fabs, the DF-750 measures moisture as a contaminant in electronics grade nitrogen, hydrogen, helium, argon and oxygen.

With Servomex’s industry-leading TDL sensing technology delivering an industry-leading 100ppt Lower Detection Limit (LDL), the DF-750 delivers a stable, highly accurate measurement that meets the precise monitoring needs of semiconductor production.

This analyzer also offers attractive affordability over product life. The DF-750’s robust sensor construction has low lifetime maintenance requirements and delivers zero-drift stability that greatly extends calibration intervals. This low cost- of-ownership combined with exceptional measurement performance means that the DF-750 is the first-choice analytical solution for UHP gas quality checks.