oxygen analyzer / hydrogen / trace / moisture



  • Measured entity:

    oxygen, hydrogen

  • Measured value:

    trace, moisture

  • Configuration:

    for integration

  • Other characteristics:

    simultaneous, monitoring, compact, TDL


A unique analyzer solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E is a compact integrated solution for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.

Combining the industry-leading properties of Servomex’s non-depleting Coulometric E-Sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E measures ultra-low levels contaminant levels of H2 and O2 within background gas blends of N2, H2, He, O2 and Ar (H2O in O2 only).

In offering an exceptionally low, industry-leading Lower Detection Limit (LDL) of 100ppt (H2O) / 45ppt (O2), the DF-760E offers the fast speed of response, unsurpassed stability and immunity from trace acid damage which makes it ideal for quality checking and leak detection in semiconductor FAB applications.

This exceptional measurement performance is supported by a low-maintenance design, delivered through the resilient zero-drift sensing technologies which require no ongoing calibration.