methane analyzer / oxygen / carbon dioxide / carbon monoxide



  • Measured entity:

    methane, oxygen, carbon dioxide, carbon monoxide, hydrogen

  • Measured value:

    trace, thermal conductivity

  • Configuration:

    for integration

  • Other characteristics:

    monitoring, NMHC, flame ionization, gas chromatography based


The NanoChrome is a high performance analyzer specifically designed for the semiconductor manufacture industry, offering ultra-trace, highest reliability monitoring of H2, CH4, CO, CO2 and NMHC in a wide range of common background gases including He, H2, N2, Ar and O2.

Using advanced new Plasma Emission Detector (PED) sensing technology and sensitive ProPeak software, both specially developed by Servomex, the NanoChrone provides considerable advantages over traditional Flame Ignition Detector (FID) and Reduction Gas Detection (RGD) sensing technologies in terms of performance, stability, safety and ability to reduce on-going costs.

Servomex’s advanced signal recovery uses patented ProPeak filtering methods to deliver a highly sensitive and selective measurement you can rely on. With no need for a methaniser or requirement flammable fuel gas, the NanoChrome also delivers appreciable cost benefits. When used with the Servomex DF-500 ultra-trace oxygen and DF-700 moisture series analyzers, the NanoChrome fulfils a unique total analysis solution
for UHP gas monitoring.