Multi-axis nanopositioning system SMARPOD 225.75

hexapodwith parallel kinematicsultra-high vacuum

The SMARPOD 225.75 is based on sophisticated parallel kinematic design and able to handle payloads of up to 10 N. The SMARPOD 225.75 is one of the larger SmarAct SMARPOD’s offering a large travel range of over 40 mm in X and Y. As an option, the base plate can be equipped with mounting posts for placing tools, sensors or other components close to the moving platform of the SMARPOD. Like other SmarAct SMARPOD’s the 225.75 is also available in a high vacuum and ultra-high vacuum version or made out of fully non-magnetic materials. Mechanical Travel [mm] - 41 (X); 41 (Y); 21 (Z) Travel [ - 20 (Θx); 23 (Θy); 41 (Θz) Max. Normal Force [N] - 10 Max. Horizontal Force [N] - 5 Dimensions [mm] - Ø 225 Height of Platform above Ground [mm] - 75 Weight [g] - 1000 Closed-Loop Sensor Types - S; SC Smallest Increment [nm] - 1 Smallest Increment [µrad] - 1 Closed-Loop Repeatability, Full Stroke MCS2 [nm] - < ± 200 Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] - < ± 10 Closed-Loop Repeatability, Full Stroke MCS2 [µrad] - < ± 15 Options Vacuum Options - HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) Non-Magnetic Option - Yes (-NM)