The Sensofar scanning confocal microscope is a noncontact optical imaging profiler that has been developed using proprietary technology. The extremely high light efficiency of the illumination hardware and the high contrast algorithms are the main advantages of Sensofar's confocal arrangement, which make the system ideal for measuring steep slopes, rough and low reflective surfaces and samples containing dissimilar materials. The new dual technology illumination hardware uses a microdisplay format without any moving part inside the measuring head, making it suitable for OEM applications. With this system it is possible to choose between confocal imaging, confocal profiling, PSI (Phase Shift Interferometry) and VSI (White Light Vertical Scanning interferometry). The user chooses the right objective and selects the appropriate acquisition and data processing algorithms.