Edge polishing machine EP-X series

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The SpeedFam EP-X series are high throughput Edge Polishers for 300mm, 200mm and 150mm prime silicon wafers. As well as our unique three surface polishing (upper/lower bevels and wafer apex) we also provide orientation flat and notch region mirror polishing to remove damage and prepare the entire domain of the edge bevel area SpeedFam has shipped about 550 Edge Polishers for prime wafers since 1988. The SpeedFam Edge Polisher is the global standard in edge preparation used in prime wafer factories all over the world. SpeedFam supports 300mm, 200mm and 150mm prime wafer production. The SpeedFam EP-X series are high throughput Edge Polishers for 300mm, 200mm and 150mm prime silicon wafers. As well as our unique three surface polishing (upper/lower bevels and wafer apex) we also provide orientation flat and notch region mirror polishing to remove damage and prepare the entire domain of the edge bevel area.