rotary magnetron
MC-Series Sputtering Components

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Characteristics

  • Options:

    rotary

Description

The MC is our mid-size internal-mount end block. It can handle targets up to 2500 mm and has a power rating of up to 100 kW DC or 80 kHz MFAC.

SCI end blocks have high reliability and a simple, easy-to-maintain design. The single-ended configuration reduces the number of rotary and static seals, one of the most common failure modes in rotary cathodes.

Our unique water fill and drain feature allows improved target cooling and full draining of the target water on blow down. The design eliminates the possibility of galvanic corrosion inside the end block, which could lead to water leaks and short circuits.

Sputtering Components’ MC end blocks can be installed on any new coater or can easily replace planar systems.