multi-channel manifold / for gas
BGMA Sputtering Components

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multi-channel manifold / for gas multi-channel manifold / for gas - BGMA
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Characteristics

  • Number of channels:

    multi-channel

  • Other characteristics:

    for gas

Description

The Binary Gas Manifold (BGMA) has equal conductance at each outlet for the most even gas flow and the fastest reactive sputtering response time, regardless of manifold length.

Flow uniformity is verified by finite element analysis.

It has a robust, simple design and is easily cleaned.

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