Multi-channel manifold BGMA

for gas

The Binary Gas Manifold (BGMA) has equal conductance at each outlet for the most even gas flow and the fastest reactive sputtering response time, regardless of manifold length. Flow uniformity is verified by finite element analysis. It has a robust, simple design and is easily cleaned. Features Equal conductance at each outlet regardless of length Segmented for main gas and additional gases Complete with mounting hardware and waste shielding Robust, simple design Benefits Highest uniformity Fast reactive sputtering response time Durable and easy to clean