3-axis micro-positioning system / piezo / for clean rooms
Steinmeyer Mechatronik GmbH
Number of axes:
for clean rooms
The MT53-PM is a micro stage manufactured by Steinmeyer. It is equipped with stainless steel preloaded bearings for backlash-free operation.
The unit features an anodized surface, and is driven by a LEGS® piezo motor. The motor has a voltage rate of 48V, and a holding force of 5N. The stage can be customized for cleanroom and vacuum applications upon request.