Wafer inspection and sorting machine Syniad Systems
Recognising the rising cost in fab space Syniad Systems have developed a unique multipurpose inspection and sorting tool. The MultiSpecTM enhances the functions of wafer sorting, microscope inspection and bright light inspection all in a single small footprint tool. Customers are allowed to configure the tool to match their own unique requirements.
Example: A customer has a requirement for wafer sorting and bright light inspection. In this scenario, Syniad can configure the tool to "not" include Microscope Inspection and the sales price will be reduced.
Unrivalled Specification:
Dimensions: 1000mm x 700mm
Class 1 cleanliness
Cassette Mapping
OCR: M12, M13 Barcode, T7
UPS for continued operation after power out
Vacuum reservoir for continued operation after power out
Syniad SmartSpecTM intuitive Software User Interface:
Split, Sort, Merge, Wand Sorting functions
Bright Light Inspection Control
Wobble Chuck Control
Standards are as follows:
Full SEMI Compliance
Full CE Compliance
Unrivalled Component Listing:
Industry leading 3 axis robot
Industry leading pre-aligner with:
Linear Accuracy ±0.0025mm
Circular Accuracy ±0.05°
Integration with all microscope types
SEMI Standard Safety Light Curtains
Dual End Effector for maximum throughput
Cassette Present "Easy OnTM" indicators
Auto e-mail off-line configuration files
Options available:
100mm - 200mm Autosizing Bridge Tool
SECS/GEM integration
SMIF 200mm
SMIF and Open (on same tool) 200mm
Wafer thickness measurement (accuracy of 0.1µm)
