Designed from extensive customer feedback, the MLTM Series MicroLoader is the most technologically advanced, reliable and user friendly tool available for wafer inspection.
At Syniad we are aware that each of our customers has individual requirements. The MLTM Series MicroLoader contains unique features which mean processes can be tailored to meet specific needs.
The MLTM Series unrivalled specification is as follows:
Dimensions 515mm x 630mm
Class one cleanliness
Cassette mapping
Syniad SmartLoadTM intuitive Software User Interface
Networked machine for data sharing
System Control
7 Axis Dedicated Motion Controller with 3 unutilised axes offering huge potential for custom applications.
Controller Area Network (CANopen) option for flexible extensions and enabled data sharing.
The option of Optical Character Reading (OCR) for individual wafer locating capabilities.
Easy implementation of wafer alignment and centralisation.
The option of a custom made base plate to mount the MLTM Series MicroLoader and any microscope
Standards are as follows:
Full SEMI compliance
Full CE complaince
Unrivalled Component Listing:
Industry leading elevator with:
Autosize 100mm - 200mm
Cassette mapping
Cassette present "Easy LoadTM" Indicators
Options available:
100mm - 200mm Autosizing Bridge Tool
Wafer centralisation
Wafer alignment
OCR: M12, M13 Barcode, T7
SECS/GEM integration
Map file import and export to the Manufacturing Execution System (MES)
