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Wafer sorter Syniad Systems
With industry leading throughput, reliability and technology the WSTM Series Wafer Sorter is the automatic choice for all your wafer sorting needs. Syniad's sorters are designed and manufactured with their customer's requirements in mind: speed, reliability and user friendliness.
Unrivalled Specification:
750 WPH cassette to cassette transfer
350 WPH with align and OCR
Dimensions: 1200mm x 1000mm (4 cassette)
Class 1 cleanliness < 0.8 particles at 0.12µm
Cassette Mapping
OCR: M12, M13 Barcode, T7
UPS for continued operation after power out
Vacuum reservoir for continued operation after house vac failure
Syniad SmartSortTM intuitive Software User Interface:
Split, Sort, Merge, Wand functions
Standards are as follows:
Full SEMI Compliance
Full CE Compliance
Unrivalled Component Listing:
Industry leading 3 axis robot
Industry leading pre-aligner with:
Linear Accuracy ±0.0025mm
Circular Accuracy ±0.05°
SEMI Standard Safety Light Curtains
Dual End Effector for maximum throughput
Cassette Present "Easy LoadTM" indicators
Auto e-mail off-line configuration files
Options available:
100mm - 200mm Autosizing Bridge Tool
200mm - 300mm Autosizing Bridge Tool
2, 3 or 4 cassette stations.
SECS/GEM integration
3rd Party data sorting for sorting on data generated from other process tools.
SMIF 200mm
SMIF and Open (on same tool) 200mm
Wafer thickness measurement (accuracy of 0.1µm)
More specifications...
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