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wafer sorter

Wafer sorter


With industry leading throughput, reliability and technology the WSTM Series Wafer Sorter is the automatic choice for all your wafer sorting needs. Syniad's sorters are designed and manufactured with their customer's requirements in mind: speed, reliability and user friendliness.


Unrivalled Specification:


750 WPH cassette to cassette transfer

350 WPH with align and OCR

Dimensions: 1200mm x 1000mm (4 cassette)

Class 1 cleanliness < 0.8 particles at 0.12µm

Cassette Mapping

OCR: M12, M13 Barcode, T7

UPS for continued operation after power out

Vacuum reservoir for continued operation after house vac failure

Syniad SmartSortTM intuitive Software User Interface:

Split, Sort, Merge, Wand functions

Standards are as follows:


Full SEMI Compliance

Full CE Compliance

Unrivalled Component Listing:


Industry leading 3 axis robot

Industry leading pre-aligner with:

Linear Accuracy ±0.0025mm

Circular Accuracy ±0.05°

SEMI Standard Safety Light Curtains

Dual End Effector for maximum throughput

Cassette Present "Easy LoadTM" indicators

Auto e-mail off-line configuration files

Options available:


100mm - 200mm Autosizing Bridge Tool

200mm - 300mm Autosizing Bridge Tool

2, 3 or 4 cassette stations.

SECS/GEM integration

3rd Party data sorting for sorting on data generated from other process tools.

SMIF 200mm

SMIF and Open (on same tool) 200mm

Wafer thickness measurement (accuracy of 0.1µm)

More specifications...

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