An extremely user friendly, benchtop 2 cassette in-line Bright Light Station. Perfect for detecting all types of defects on wafer sizes 100mm - 200mm. Needs only power and vacuum connection for instant inspection.
Unrivalled Specification:
Intuitive Embedded Recipe Manager, allows:
Multiple Inspection Phases
within a recipe
Inspection Recipes stored locally
100mm - 200mm ready
Multiple Light Sources:
UV
Halogen
Monochromatic
Fibre Optic "spot"
Small Footprint
Wobble Chuck with joystick controls for:
Tilt X
Tilt Y
Rotation Direction
Rotation ON/OFF
Rotation Speed
Reject/Accept Options
2 cassette stations
Benchtop system
