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Vacuum compatible linear electric motor (ironless)
U-Vacuum Tecnotion B.V.

The demand for linear motors that function reliably under vacuum conditions is growing rapidly among customers in the electronics and semiconductor industries. Especially companies who are building machines for lithography and automated wafer inspection need linear motors for nanometer accuracy and high-speed positioning purposes. As the leader in linear motor manufacturing Tecnotion has taken this challenge on.

Right now a series of vacuum versions of the standard Tecnotion ironless linear motors are built into prototype wafer inspection machines under the name UM-V7.

No outgassing
The results are promising. With a completely new motor design Tecnotion has succeeded in maintaining the ultra-precision for which all Tecnotion standard products are known.
By using stainless steel and avoiding plastics in the motor housing of the UM-V types Tecnotion has successfully solved the outgassing problem. Even under the most critical vacuum conditions, such as 10-7 the UM-V7 motor meets all the requirements concerning outgassing in relation to contamination management and rapid pump dosing.

Controlled cooling
Instead of using a conventional nickel coating the temperature control of the UM-V motors is realized with an advanced radiation absorption system. This sophisticated system has proven to allow optimal motor and electronics cooling and thermal management.