Gas control system SCI-552

The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller. ​The SCI-552 features hardware and software support for a number of system interlock functions. The SCI-552 provides flexibility for the end user, allowing control of the system via the front panel user interface, MODBUS serial interface, or various discrete digital and analog I/O points. The SCI-552 is designed to support two ozone generators providing two independent channels of ozone output. Features - RS-232 MODBUS remote support - Control up to 2 Ozone Generators - Interface with up to 2 Model 452 & Model 470 Ozone Sensors - Control up to 4 Mass Flow Controllers - Control up to 2 Backpressure Controllers - Control up to 2 EV Valves - Control a water chiller - System Interlock Inputs - Remote system-level controls and status I/O Applications ​​​- Chemical Vapor Deposition (CVD) - Atomic Layer Deposition (ALD) - Oxide growth - Surface conditioning - Ashing - Particle Cleaning - Photoresist Removal - Others