Vacuum gauge and controller
Teledyne Hastings Instruments
Vacuum Range 0.0001 - 1000Torr (0.1 mTorr - 1000 Torr)
Accuracy
+/-1.5% of Reading 100-1000 Torr
+/-20% of Reading 0.001 - 100 Torr
Sensor Type Piezo resistive - 32 - 1000 Torr
Direct Force Independent of Gas Composition Weighted AVG between 8 and 32 Torr
