The electronic autocollimators of the TriAngle® UltraSpec series represent high-precision angle measurement systems for extremely high demands on angle resolution and measurement accuracy.
Key Features
Mechanically and thermally optimized design
Calibrated with PTB angle standards and supplied with test certificates and individual calibration curves
Consistently guaranteed traceability of the measuring results to international standards of the angle measuring variable
Available with 300 mm and 500 mm objective focal lengths
A variable measuring range and accuracy performance of up to 0.05 arcsec depending on the focal length
Permits precise and reliable measurements even under difficult conditions
Superbly corrected objective lens of minimum distortion and a high resolution
Digital CCD camera with extremely low sensor noise
Stabilized high power LED illumination
OptiAngle 5 Software
Applications
Calibration laboratories
Semiconductor equipment manufacturing
High-energy physics
Laser physics
Space science
Therefore, TriAngle® UltraSpec autocollimators are used for high-end measuring, testing and adjustment processes where highest precision and reliability in angle determination are required, for example:
Adjustment and verification of the straightness of linear stages
Run-out measurement of rotary tables
Measurement of large-area surface flatness
Alignment of optical components
Alignment of machines and equipment
Stability studie