Metal hot plate HP-300

electricprecision

This high precision hot chuck has a heated area with 310 x 310 mm. It can be used as build-in or stand-alone chuck with an external controller. The vacuum hot plate has vacuum holes in a pitch of 25mm each (1mm Diameter) for holding the substrate or wafer. The maximum temperature is 300 °C. 3-Zone-temperature measurement incl. Software for managing the temperature profiles