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Solenoid valve 078 series
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Characteristics
- Temperature
Max.: 120 °C
(248 °F)Min.: 0 °C
(32 °F)
Description
Transfer door for Flat Panel Display and Thin Film Photovolatic production systems. Transfer doors are designed for use at atmospheric side of the in- or outcoming chamber (load lock) of a system.
Door
Vertical mounting orientation
Gate
Various sealing materials for gate seal
Gate shield for heat radiation or coating from process protection
Catalogs
Other VAT Vakuumventile AG products
Transfer valves and doors for display & solar
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.