Transfer valve
50x500 - 150x1750 mm| 024 series
VAT Vakuumventile AG
Area of application:
Transfer valve for glass substrate Generation 3 up to G6 Flat Panel Display production systems. In the FPD production systems the MONOVAT transfer valve is used for load lock, transfer and process chamber isolation.
Description:
The key features of the MONOVAT valve technology are the proven three-dimensional sealing technology, low particle and shock generation, modular design enables easy up scaling and compact outside dimensions. By a wide range of options like protection shield for gate, cooling system for body & gate etc. (see table options) the catalogue product can be flexible adjusted to specific requirements.
