The Dimension Vx200/300 Atomic Force Profiler (AFP) combines the resolution of an atomic force microscope (AFM) with the long scan capability of a profiler to offer the highest performance profiling and atomic force microscopy available. It offers non-destructive profiling for CMP control and characterization and high aspect ratio depth measurements in a single platform for 200mm and 300mm substrates. This semi-automated platform can be configured to handle a variety of samples including wafers, data storage sliders, and square substrates.
