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PVD deposition machine / ion beam-assisted
SPECTOR-HT® VEECO

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Characteristics

  • Method:

    PVD

  • Technology:

    ion beam-assisted

Description

The SPECTOR-HT is a PVD deposition machine that is assisted with an ion beam. It is capable of achieving optimum levels of productivity by providing maximum through-put for accurate optical thin films. This machine is specially designed to increase deposition rates, lot sizes and target utilization as well as reduce process time. It is equipped with an innovative tool geometry that significantly enhances the uniformity of the material. A 30% target rate for material usage is significantly improved by the SPECTOR-HT PVD deposition machine.