MEMS inspection system FF35 CT

X-raysemiconductor3D

With its optional dual-tube set-up, the FF35 CT combines unprecedented CT data quality with the highest versatility when inspecting small and medium-sized parts. • Single or dual tube configuration for highest versatility in laboratory micro-CT applications • Switch between 225 kV micro-focus and 190 kV nano-focus tubes in seconds with the touch of a single button • Accurate results due to granite-based manipulation and air conditioning • Application flexibility due to various CT trajectories and FoV extensions via software platform Geminy • Optional metrology version with an MPESD = 5.9 µm + L/75 [L in mm] • Available as FF35 CT SEMI version in compliance with semiconductor market standards • NEW! Maximum sample weight now up to 50kg - Also available as an upgrade Flexible inspection of very small to medium-sized parts The Comet Yxlon FF35 CT, FF35 CT Metrology, and FF35 CT SEMI cover an extraordinary range of applications. Capabilities include improved material testing in the R&D department, optimization of process control and small series inspection as well as various scientific applications. The dual X-ray tube set-up enables the high-resolution CT system to significantly expand quality assurance and research possibilities in the automotive, electronics, aviation, and material science industries. Proven technology: 225 kV micro-focus directional beam tube With its high power of 320 W and water-cooled target, the 225 kV Comet Yxlon directional beam tube enables quick CT scans in less than a minute.