Displacement measuring interferometer positioning system
Zygo
ZMI™ Series - Displacement Measuring Interferometers
ZMI™ components can be assembled in a wide variety of configurations. The example systems below show some typical configurations used by ZMI™ customers.
2-Axis System
2-Axis System (Vacuum)
3-Axis System
Flat Panel Application
ZMI™ components can be assembled in a wide variety of configurations. The example systems below show some typical configurations used by ZMI™ customers.
2-Axis System
2-Axis System (Vacuum)
3-Axis System
Flat Panel Application
