Optical gauge for surface flatness measurement
CP7300™ Zygo

Employing proprietary optical scanning technology, the CP7300 provides fast, noncontact, automated 3D surface height, roughness, and local area planarity and uniformity measurements on wafers for rapid, quantitative characterization of photo-lithographic, etch, and polishing process effects. Surface metrology applications include, but are not limited to, measurement and process control of critical surface texture parameters on bare and patterned wafers.
Programmable and automated measurement sequences and sample positioning allows for surface characterization at multiple sites and locations. Integral to each system is a comprehensive and powerful software analysis package with application-specific modules, providing full 3D imaging and data reporting of many surface topography parameters.