Positioning system using displacement interferometry Zygo
ZYGO's ZMI Displacement Measuring Interferometers (DMI) are the worldwide price & performance benchmarks for position measurement feedback in OEM applications. ZYGO's ZMI product line offers the broadest range of price and performance available today while continuing to add significant new innovations
Applications
- Lithography tools: optical steppers and scanners, e-beam & laser mask writers
- Mask, wafer and LCD inspection and measurement tools, CD-SEM's
- Process equipment: memory repair tools, probers, die bonders, drilling tools
- Measurement and Calibration of high resolution or high frequency mechanical motions.
