Clean room micro-positioning systems

2 companies | 3 products
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3-axis micro-positioning system
3-axis micro-positioning system
X100+Y100+PSR300MHS-ABS

Load: 10 kg
Stroke: 300 mm
Speed: 1 m/s

XY TABLE WITH LINEAR MOTORS ROTARY TABLE DDR DIRECT DRIVE ROTARY XY travel 300x300 mm Rotation unlimited Absolute encoders Linear resolution 0.1 micron Rotary resolution 0.25 arc-sec

ultra-high vacuum micro-positioning system
ultra-high vacuum micro-positioning system
MP105-3 series

... applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning. Application areas Precision ...

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Steinmeyer Mechatronik GmbH
ultra-high vacuum micro-positioning system
ultra-high vacuum micro-positioning system
MP53-3-PM-10-PM-L

... with high-resolution measuring system for repeatability up to 0.005 µm • Combinable with rotary stages for rotary applications • Individual adaptation to the installation situation in the chamber • ...

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Steinmeyer Mechatronik GmbH
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