High-Speed, Non-Contact Optical Temperature Pyrometer with Integrated Reflectance Measurement and Emissivity Compensation
Advanced Energy’s Sekidenko MXE measures at ultra-high-speed sampling rates (up to 10 kHz) and offers combined temperature and active reflectance for precise control in dynamic processes.
•Precise temperature measurement enabling closed-loop process control
•Configurable wavelength based on material type and required temperature range
•Both analog and digital communications
Overview
The Sekidenko MXE pyrometer combines speed and precision, enabling accurate, non-contact, repeatable measurement and control of demanding applications. Its high-speed (up to 10 kHz) performance is ideal for processes with moving targets, such as rotating susceptors. It is also extremely well-suited for dynamic processes, including laser-based processing or rapid anneals. The remarkably compact MXE is easily integrated. Its flexible control options support a variety of I/O protocols.
Benefits
•Improves temperature-measurement accuracy for critical processes
•Enhances repeatability and minimizes variation
•Increases productivity, yield, and throughput
•Increases stability and reliability across multiple chambers and substrate materials
Features
•In-situ, non-contact temperature and emissivity measurement
•High-speed measurement ideal for a variety of applications
•Variety of temperature and reflectance wavelengths
•EtherCAT®, USB, and RS-232 output option