Compact, Single-Channel Optical Fiber Temperature Pyrometer for High-Volume Semiconductor Applications
The Sekidenko OR400T delivers accurate, non-contact temperature and emissivity measurements in a compact, modular platform.
•Configurable wavelength based on material type and required temperature range
•Remote lensed optical sensors or sapphire light pipes for in-situ measurement
•Both analog and digital communications with optional Fieldbus protocols for closed-loop control
The Sekidenko OR400T is a single-channel, non-contact optical fiber temperature pyrometer that measures infrared energy being emitted from an object and converts it into usable temperature data (degrees °F or °C). The Sekidenko OR400T can be configured in a variety of measurement wavelengths based on target materials, process temperature ranges, and working distances from 3.9 in (100 mm) to 118.1 in (3000 mm). Available temperature ranges are: 122°F (50°C) to 2912°F (1600°C).
•Improves temperature-measurement accuracy for critical processes
•Enhances repeatability and minimizes variation
•Increases productivity, yield, and throughput
•Increases stability and reliability across multiple chambers and substrate materials
•Customizes to meet unique functional and mechanical requirements
•In-situ, non-contact temperature measurement employing lensed optical sensors or sapphire light pipe sensors
•Industry-leading temperature and read rates
•Highly flexible, module-based platform architecture
•Full I/O and external trigger/synchronization suite
•Multi-channel capability and read rates up to 2 kHz