Single-Channel Temperature Measurement Capability with Selectable/Fixed Emissivity
The Sekidenko OR400M offers the precise temperature measurement essential to semiconductor applications that require longer wavelengths.
•Configurable wavelength based on material type and required temperature range
•Integrated optical sensor
•Both analog and digital communications with optional Fieldbus protocols for closed-loop control
Advanced Energy’s OR400M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 3.3 to 5.2 µm. The OR400M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The OR400M supports RS-232 and analog data interfaces. Because of its compact design, the OR400M can easily meet small-footprint requirements of many process applications.
•Improves temperature measurement accuracy for critical processes
•Enhances repeatability and minimizes variation
•Increases productivity, yield, and throughput
•Increases stability and reliability across multiple chambers and substrate materials
•Non-contact temperature measurement employing lensed optical sensors
•Automatic ambient thermal correction
•Industry-leading temperature and read rates
•Highly flexible, module-based platform architecture
•Full I/O and external trigger/synchronization suite