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Linear nanopositioning stage QNP-L series
piezoelectric1-axiscompact

linear nanopositioning stage
linear nanopositioning stage
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Characteristics

Orientation
linear
Type
piezoelectric
Number of axes
1-axis
Other characteristics
compact, precision, closed-loop, aluminum
Stroke

Min.: 100 µm

Max.: 600 µm

Description

Design Features •Travel ranges from 100 µm to 600 µm available •Long device lifetime •High-precision, frictionless flexure guidance system •Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor options •Mounting compatibility with other QNP-series piezo nanopositioners •Open-loop and vacuum versions Aerotech’s QNP™-series of piezo nanopositioning stages offer sub-nanometer-level performance in a compact, high-stiffness package. A variety of travel (100 µm to 600 µm) and feedback options make this the ideal solution for applications ranging from microscopy to optics alignment. High Quality in a Compact Package The QNP piezo stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. Furthermore, these stages have been designed to provide excellent geometric performance (straightness and angular errors) while at the same time minimizing the overall stage package size. High-resolution and Positioning Accuracy All of the QNP piezo stages have the option of closed-loop feedback using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.

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