•Travel ranges from 100 µm to 600 µm available
•Long device lifetime
•High-precision, frictionless flexure guidance system
•Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor options
•Mounting compatibility with other QNP-series piezo nanopositioners
•Open-loop and vacuum versions
Aerotech’s QNP™-series of piezo nanopositioning stages offer sub-nanometer-level performance in a compact, high-stiffness package. A variety of travel (100 µm to 600 µm) and feedback options make this the ideal solution for applications ranging from microscopy to optics alignment.
High Quality in a Compact Package
The QNP piezo stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. Furthermore, these stages have been designed to provide excellent geometric performance (straightness and angular errors) while at the same time minimizing the overall stage package size.
High-resolution and Positioning Accuracy
All of the QNP piezo stages have the option of closed-loop feedback using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.