Linear nanopositioning stage QFOCUS QF46Z series

linear nanopositioning stage
linear nanopositioning stage
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Number of axes
Other characteristics
precision, high-speed, closed-loop


Design Features •Travels from 100 μm to 300 μm •High stiffness and dynamics resulting in outstanding step-and-settle and scanning performance •High precision, frictionless flexure guidance •Long device lifetime •Superior positioning resolution and linearity with direct-metrology capacitive sensor option •Mounting flexibility with a variety of threaded adapters or mounting holes for custom mounting arrangements •Clear aperture to 29 mm diameter Aerotech’s QFOCUS® QF46Z piezo nanopositioning stage series enables microscope objective and optics positioning at high-speeds with nanometer-level performance. Available in closed-loop travels of 100 μm and 250 μm (120 μm and 300 μm open-loop), the QF46Z provides long travels without sacrificing dynamic operation and nanometer precision. The QF46 is designed with next-generation optical instruments and laser machines in mind. For example, the QF46Z can perform better than competitive offerings with larger and heavier higher numerical aperture (NA) objectives due to its higher inherent stiffness. The QF46Z is perfect for any demanding optical application requiring high precision and throughput with long travels. Precision Mechanical Structure The QFOCUS QF46Z piezo stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response.


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