Hexapod micro-positioning system HEX150-140HL series
6-axisXYZpiezo

hexapod micro-positioning system
hexapod micro-positioning system
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Characteristics

Number of axes
XYZ, 6-axis
Features
hexapod, piezo
Other characteristics
compact, servo controlled
Repeatability

0.15 µm, 0.4 µm, 0.75 µm, 1.5 µm

Load

2 kg, 7.5 kg
(4.41 lb, 16.53 lb)

Stroke

16 mm, 40 mm
(0.63 in, 1.57 in)

Speed

8 mm/s, 20 mm/s

Description

Our HexGen® HEX150-140HL provides consistent and reliable six degree-of-freedom (DOF) motion in a compact yet stiff platform. You’ll benefit from ultra-fine positioning resolution, ample payload capacity, high process throughput and more. HEX150-140HL offers flexible integration and intuitive operation with our powerful motion controllers, making it the perfect choice for applications that require complex multi-DOF motion when available space is limited. •Offers compact size & ample range of motion for simple integration into complex applications •Supports high payloads to 7.5 kg & resists backdriving to 100 N •Coordinates with other motion axes (servo, stepper, piezo & more) using our controllers •Provides easy, convenient pivot-point adjustment •Pairs with powerful controls & visualization software HEX150-140HL is ideal for addressing space-constrained, multiple degree-of-freedom applications requiring fine positioning resolution, including: •Photonic device manipulation, alignment & packaging •Optics inspection & alignment •Optical wafer probing •Aerospace & satellite sensor testing •Synchrotron & beamline sample manipulation

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.