•Direct-drive, slotless, brushless servomotor
•Zero cogging motor for outstanding velocity stability
•Outstanding error motion and wobble performance
•Direct coupled, high-accuracy rotary encoder
•Low-profile planar design
•No mechanical contact
Aerotech's ABRS series rotary air-bearing stages provide superior angular positioning, velocity stability and error motion performance in an exceptionally low-profile package. The ABRS is designed to meet the exacting requirements of wafer inspection, high precision metrology, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication.
The design of the ABRS series direct-drive rotary stage has been optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system, minimizing "stack-up" related errors. In addition to the low overall height, the ABRS series provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance or application-specific requirements.
Superior Mechanical Design
The ABRS design features large air-bearing surfaces for high stiffness and load capacity, producing not only excellent axial and radial error motions but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance.