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Rotary positioning stage ABRS series
motorized1-axiscompact

rotary positioning stage
rotary positioning stage
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Characteristics

Orientation
rotary
Type
motorized
Number of axes
1-axis
Other characteristics
compact, high-accuracy, low-profile, air bearing

Description

Design Features •Direct-drive, slotless, brushless servomotor •Zero cogging motor for outstanding velocity stability •Outstanding error motion and wobble performance •Direct coupled, high-accuracy rotary encoder •Low-profile planar design •No mechanical contact Aerotech's ABRS series rotary air-bearing stages provide superior angular positioning, velocity stability and error motion performance in an exceptionally low-profile package. The ABRS is designed to meet the exacting requirements of wafer inspection, high precision metrology, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication. Compact Package The design of the ABRS series direct-drive rotary stage has been optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system, minimizing "stack-up" related errors. In addition to the low overall height, the ABRS series provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance or application-specific requirements. Superior Mechanical Design The ABRS design features large air-bearing surfaces for high stiffness and load capacity, producing not only excellent axial and radial error motions but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.