Linear nanopositioning stage ANT95-L series
linear servo-motor1-axisprecision

linear nanopositioning stage
linear nanopositioning stage
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linear servo-motor
Number of axes
Other characteristics
precision, high-speed, aluminum, crossed roller

25 mm, 50 mm, 75 mm, 100 mm (0.984 in)


0.5 m/s (1.640419948 ft/s)


Design Features •Nanometer-level performance in a large travel format •High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) •In-position stability of <1 nm •Anti-creep crossed-roller bearings •High dynamic performance Introduction Aerotech’s ANT95L series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95L and ANT95L-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. These linear stages exhibit up to 5 g acceleration, 500 mm/s velocity, enhanced load capacity and are available with standardized, universal base mounting patterns that allow their use in a wide range of configurations. Noncontact Direct-Drive Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95L stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.



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