•Integrated, low-profile, XY linear motor stage
•Nanometer-level performance in a large travel format
•High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm)
•In-position stability of <1 nm
•Anti-creep crossed-roller bearings
•High dynamic performance with direct-drive technology
•ULTRA performance grade option
Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-XY crossed-roller-bearing, linear motor, dual-axis stage provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three performance grades.
Ultra-Precise Stage Design
The ANT95XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm and 50 mm x 50 mm) come with the 60 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces.