Linear nanopositioning stage ANT95-XY series

XYmotorized2-axis

Design Features •Integrated, low-profile, XY linear motor stage •Nanometer-level performance in a large travel format •High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm) •In-position stability of <1 nm •Anti-creep crossed-roller bearings •High dynamic performance with direct-drive technology •ULTRA performance grade option Introduction Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-XY crossed-roller-bearing, linear motor, dual-axis stage provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three performance grades. Ultra-Precise Stage Design The ANT95XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm and 50 mm x 50 mm) come with the 60 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces.