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Linear nanopositioning stage ANT95-XY series
XYmotorized2-axis

linear nanopositioning stage
linear nanopositioning stage
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Characteristics

Orientation
linear, XY
Type
motorized
Number of axes
2-axis
Other characteristics
low-profile, crossed roller
Stroke

25 mm, 50 mm (0.984 in)

Speed

0.5 m/s (1.640419948 ft/s)

Description

Design Features •Integrated, low-profile, XY linear motor stage •Nanometer-level performance in a large travel format •High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm) •In-position stability of <1 nm •Anti-creep crossed-roller bearings •High dynamic performance with direct-drive technology •ULTRA performance grade option Introduction Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-XY crossed-roller-bearing, linear motor, dual-axis stage provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three performance grades. Ultra-Precise Stage Design The ANT95XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm and 50 mm x 50 mm) come with the 60 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.