•Nanometer performance in a large travel format (25 and 50 mm)
•High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm)
•In-position stability of <2 nm
•Anti-creep crossed-roller bearings
•High dynamic performance
The ANT95LZ crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades.
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95LZ stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance for high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.
The ANT95LZ stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user-adjustable from 0 to 5 kg.
Flexible System Design
The ANT95LZ family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.