Linear positioning stage ALS130H series
motorizedsingle-axiscrossed roller

linear positioning stage
linear positioning stage
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Number of axes
Other characteristics
compact, precision, crossed roller, ball screw

25 µm, 50 µm, 100 µm, 150 µm (0.984 in)


0.3 m/s (0.984251969 ft/s)


Design Features •Bi-directional repeatability to 75 nm •Direct-drive linear motor for ultra-precise motion •High-accuracy noncontact glass-scale linear encoder •Anti-cage-creep crossed-roller bearings for smooth motion •Outstanding performance in a small footprint The ALS130H, with its sub-nanometer resolution, superior bidirectional repeatability and exceptional low-velocity performance, is the unparalleled solution for high performance test, measurement, inspection and other demanding applications. Linear Motor Drive Unlike many stages that utilize a side-drive lead screw, the ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup or "stiction" that is normally associated with a lead screw or ball-screw drive. The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages. Exceptional Resolution For alignment applications, outstanding step-to-step resolution is critical. The ALS130H meets this demand with a resolution of 0.5 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS130H to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical. Furthermore, the linear motor and high resolution encoder system also provide excellent in-position stability.



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