Fluorescence spectroscopy software EPXA

Windows

The software consists of a main program that provides the user interface, and various machine input/output functions, together with at least two libraries (DLL’s) that provide the spectrum processing and ZAF calculations for spectra taken on a SEM fitted with an EDS detector. The software runs on standard PC’s and operating systems (Windows XP, 7, etc.). Complete ZAF analysis is possible, with or without standards, using an internal database of fundamental parameters (FP) such as absorption coefficients, fluorescence yields, transition probabilities, etc. There is also a spectrum display module included. The software also includes the acquisition of spectra using Amptek DPP hardware. The underlying methods and results file (a so-called EDX file) can be setup and re-used for routine analysis, or elements can be selected for each new spectrum analysis. The software can analyze either bulk materials or a single-layer thin-film material. Analysis can be done without standards if the results can be normalized to 100%. When using standards, thickness can also be determined or the results do not have to be normalized.