CSE capsule filters are compact capsule assemblies. They are developed for the filtration of photoresist, developer, etchant stripper and DI water in photolithography process, as well as for the filtration of small volume batch chemicals.
Features and Benefits
● Compact and sturdy construction
● High pressure resistance
● Low hold-up volume
● O-ringless design
● Disposable design, easy change-out
Quality
● Capsules produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System