We offer a wide range of extremly performant, reliable temperature control systems for the semiconductor industry. The modular concept for convenient, cost effective system upgrades, highest safety of investment and easy customization.
Core Technology
Universal Chuck Design – one chuck for air- and liquid cooled systems
Hybrid Chuck Design – operation with and without cooling unit
Air Cooled High Temp Systems
Hybrid Chuck usable for air- and liquid cooling
The table below shows the overall specifications overview. Chuck performance may vary between different prober types and applications.
Advanced Temperature Test Systems means best available components for our products and the most advanced manufacturing technology. Our products are designed for exceptional thermal and mechanical stability and precision.
AddOn Technology
Modular AddOn Stacks for various applications
eWLB, HV/HC, LN, Plain, Caro, etc..
Low Thermal Resistance (LTR)
Low Thermal Resistance (LTR) Technology
MultiSense Technology
High Accuracy Applications
High Power Applications
LTR High Accuracy
Low Thermal Resistance Technology
MultiSense with multiple temperature sensors
Designed for low power and sensor devices
Best temperature accuracy and uniformity
LTR High Power
Low Thermal Resistance Technology
For high power and high parallelism devices
High power dissipation @ wide temperature range
IntelligentDry Air Control
Active CDA purge control to reduce the dry air consumption
Advanced dry air control to purge with two individual media
Bonding pad protection
Adaptive dew point control
Thin/Warped Substrates
Patented Bernoulli functionality for extremely thin wafers and substrates