Compact mass flow controller with EtherCAT interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).
It offers the following advantages:
• - Ultra compact size
• - Fast settling time 1000:1
• - High long-term stability
• - Ethernet connectivity with a EtherCAT interface
It is recommended for standalone applications and system integration in industrial, analytical and medical applications where the MFCs need to be integrated into Ethernet-based networks with an EtherCAT communication interface.