This machine is a fully-automatic wafer cleaning machine, automatically operated by a manipulator in a closed environment, has cleaning and drying functions, suitable for cleaning of various semiconductor substrate materials after polishing, and can effectively reduce particle contamination on the wafer surface.
Complete functions
With the function of cleaning and drying, operated by a manipulator in a closed environment, low risk, prevention of secondary pollution.
Simple operation
PLC touch screen control, manipulator automatically completes the automatic wafer cleaning process from cassette to cassette.
Good compatibility
Compatible with 2, 4 and 6 inch wafer
Small floor space
Minimize the floor space in the clean room.