Wet Bench for Semiconductor & Other FM4910 Applications
Our wet bench systems are used for semiconductor chemical handling of various applications, electro-chemical processing and/or acid processing as well as other chemical wet process applications. Typical construction materials include polypropylene, stainless steel, PVDF, PVC-C as well as Teflon®, PFA, and ECTFE (HALAR®) depending on the chemical handling properties, UL2360/FM4910 standard compliance and required for the application.
This integrated semiconductor wet bench has in-tank cross flow exhaust allowing for cleaning, rinsing, acid processing and final rinsing in an open top wet bench.
What are UL2360/FM4910 standards?
Increasingly complex manufacturing processes are required to continue innovation of smaller and smaller semiconductor circuit boards and chips. Contamination of cleanrooms of any kind can be catastrophic and contamination caused by fire and smoke is no different. FM-4910 designation is given to a material that passes the Factory Mutual test for fire propagation, and smoke density. Even the most advanced expensive fire suppression systems of the past could not contain the contamination caused to other processes and products in neighboring areas. Proportionally increasing insurance costs to protect manufacturers in the event of fire and mass contamination have become equally expensive and have driven wet bench construction to use less flammable materials and eliminate the costly fire suppression systems.