Pressure Sensors based on MEMS Technology
Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSI™ system.
Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst has developed the IQ+FLOW® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure meters and controllers.
•Lowest range 0,01...0,5 bar
•Highest range 0,2...10 bar
Customer specific designs
Based on the micro system technology of IQ+FLOW® series, Bronkhorst also offers the possibility to combine functional modules on a compact manifold. See IQ+FLOW manifold solutions
High intrinsic quality, featuring...
•Compact assembly ensures space efficiency
•Economical solution, low cost of ownership
•Analog or digital communication
•Top-mount modules; easily accessible
•Pre-tested “Plug and Play” manifold assemblies, reducing custom testing requirements