Gas pressure controller SLA7840

flowadjustabledigital

High purity flow path. Superior repeatability, stability and response time. The Brooks model SLA7840 is a high purity metal sealed instrument that controls pressure while measuring flow rate. A remote pressure transducer signal, along with adjustable integral PID control electronics and a co-planar control valve, maintains the desired set pressure. The co-planar valve reduces sensitivity to pressure variations and offers lower leak-by rates compared to other metal sealed controllers ensuring a more stable process over time. Features • Integral pressure transducer • Response time: <1 second • Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm • Max pressure 500 psig • All-metal seal flow path: 32µ inch Ra maximum surface finish • Co-planar valve offers lower leak-by rates • Multi-gas/multi-range capability allows for storage and pre-programming of up to 10 gas calibrations and ranges on a single device • DeviceNet® and analog communication options Benefits • Larger co-planar valve control range reduces sensitivity to pressure variations in the process, ensuring a more stable process over time • All metal wetted flow path to maintain particle, moisture and contamination free process conditions • Device can also be configured as a mass flow controller for calibration or test purposes • Multi-gas/multi-range capability reduces inventory • Greater control range provided by co-planar valve decreases number of parts needed to control the process • Compact, space saving footprint is easily retrofitable Digital communication offers easy commissioning and reduced system wiring