FT-IR spectrometer / R&D / robust / high-sensitivity



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    robust, high-sensitivity


The Bruker Optics Cryogenic Silicon Analysis System (CryoSAS) is a dedicated all-in-one system for the low temperature (<15K) impurity analysis of Silicon. CryoSAS is optimized for operation in the industrial environment.
CryoSAS combines Bruker's high performance FTIR spectrometers with built-in, closed-cycle cryo-cooling technique that does not require any liquid Helium. All CryoSAS components are state-of-the-art, yet utilize proven technologies to accomplish a difficult analysis in the demanding silicon production environment. CryoSAS can be operated at a high level of automation including accurate reporting of the analysis results.