Screw vacuum pump COBRA DS 0600 E
dryplasmacompact

screw vacuum pump
screw vacuum pump
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Characteristics

Technology
screw
Lubrication
dry
Applications
plasma
Other characteristics
compact
Ultimate vacuum

0.01 mbar
(0 psi)

Flow rate

600 m³/h
(21,188.8 ft³/h)

Description

COBRA DS 0600 E Advanced Screw Design Efficient: low operating costs, minimal maintenance, high uptime Flexible: application-oriented Short Process Times: due to high pumping speeds Compact Design COBRA DS 0600 E is a dry screw vacuum pump in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat panels and semiconductors. State-of-theart COBRA DS screw vacuum technology allows powder- and particle-laden media to be evacuated. COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion. Equipped with a high-efficiency motor, the COBRA DS 0600 E offers excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-ofownership is very low, setting the standard in this performance class. Retrofitting this screw vacuum pump to existing systems can be performed quickly and easily due to a fit-in-place design. Applications High-density plasma CVD (HDP-CVD) Rapid thermal processing (RTP) Sub-atmospheric CVD (SACVD) Metal-organic CVD (MOCVD) Plasma-enhanced CVD (PECVD) Low-pressure CVD (LPCVD) Atomic layer deposition (ALD) High-capacity load lock

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Exhibitions

Meet this supplier at the following exhibition(s):

Hannover 2024
Hannover 2024

22-26 Apr 2024 Hannover (Germany) Hall 13 - Stand E12

  • More information
    IFAT 2024
    IFAT 2024

    13-17 May 2024 München (Germany) Hall Vide - Stand B2.127/226

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    *Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.