TURBO TM 1100 - 2200 A
Turbo are the turbomolecular vacuum pumps from Busch. Turbo vacuum pumps have been developed for industrial high vacuum applications and are designed for high vacuum applications up to 1·10-10 hPa (mbar) and high pumping speeds or gas flow rates. The gas is conveyed without any operating fluids. Even the highest loads or any unwanted gas leaks do not affect the high pumping speed of Turbo vacuum pumps. The vacuum pumps can be operated in any mounting position. The compact rotor design is unrivalled in its class and combines the highest pump capacity with the smallest dimensions. Drive unit and control system are completely integrated into the pump housing. Sealing gas and flush connection come as standard. Turbo vacuum pumps are ideal for use in numerous industrial high-vacuum applications, such as:
Physical vapour deposition (PVD)
Thin film coating
Turbo turbomolecular vacuum pumps work according to the turbine principle. Rapidly spinning rotor blades rotate between the stator blades. This causes impulses to be sent to the disordered gas particles inside the vacuum pump, which in turn causes a controlled stream of gas to move from the inlet to the outlet of the vacuum pump. To generate this momentum, the rotors reach a peripheral speed of >30.000 min-1. The integrated high-pressure stage permits a higher fore-vacuum and therefore, smaller backing pumps. The permanently lubricated ceramic bearings have a mean time between failures of more than 200.000 hours.